LithoBench: Benchmarking AI Computational Lithography for Semiconductor Manufacturing
active 2023-11-06 → 2026-08-04 (UTC)
Activity over time
Daily event counts in the loaded window
Line chart, 1003 days from 2023-11-06 to 2026-08-04. Pushes: 0 total, peak 0 in a day. Pull requests: 0 total, peak 0 in a day. Issues: 7 total, peak 3 in a day. Comments: 4 total, peak 1 in a day. Stars: 54 total, peak 2 in a day.
- Pushes
- Pull requests
- Issues
- Comments
- Stars
Stars, PRs, issues and forks are under-captured in the later part of this window. GH Archive progressively stopped capturing non-push events during 2026 — −95% or worse by the end of the window. Every series here except Pushes fades for that reason, so a decline above reflects the archive, not this repository. Pushes stay reliable throughout, so read them, and the contributor counts derived from them, as the real signal. Data health has the measurements.
Top contributors
Pushes, PRs, issues, reviews and comments — stars and forks excluded, so this is contribution rather than popularity
| Contributor | Contributions | Pushes | PRs | Comments |
|---|---|---|---|---|
| thomashirtz | 4 | 0 | 0 | 3 |
| Utine | 3 | 0 | 0 | 0 |
| mmx-Lv | 1 | 0 | 0 | 0 |
| sunjhfighting | 1 | 0 | 0 | 0 |
| gaussiangit | 1 | 0 | 0 | 1 |
| Moshibing | 1 | 0 | 0 | 0 |
Recent activity
Latest issues, pull requests and releases
- Issue#10mmx-Lv2026-01-07 08:49Questions about pixelILT and levelsetILT
- Issue comment#6thomashirtz2025-07-02 07:10LithoSim training
- Issue comment#2gaussiangit2025-07-01 19:39Training model on custom dataset
- Issue comment#8thomashirtz2025-06-28 09:22`lithosim.sim(image)` returns near-zero values instead of expected aerial/printed intensities
- Issue#8thomashirtz2025-06-27 07:51`lithosim.sim(image)` returns near-zero values instead of expected aerial/printed intensities
- Issue comment#3thomashirtz2025-06-26 08:02Cann't get correct litho(aerial) image using exact.py in pylitho
- Issue#7sunjhfighting2025-02-18 03:21Some questions regarding the dataset you provided.
- Issue#5Moshibing2024-11-10 13:25Can you provide some EdgelevelILT dataset?
- Issue#1Utine2024-03-29 20:39Layout .oas files
- Issue#1Utine2024-03-29 20:39Layout .oas files
- Issue#1Utine2024-03-29 20:27Layout .oas files
Totals cover only the window loaded into ClickHouse and count events, not GitHub's lifetime totals — 54 stars here means stars gained during the window, not the repo's star count.